Title

Enhancement of the Diamond Film Characteristics by Increasing the Cyclic Moducation time Interval of CH4 Flow

Document Type

Article

Publication Date

2003

Publication Source

New Diamond and Frontier Carbon Technology

Volume

13

Issue

6

Inclusive pages

333-340

Publisher

M Y U * Scientific Publishing Division

Place of Publication

Japan

ISBN/ISSN

13449931

Abstract

Diamond films were deposited on a 10.0 × 10.0 mm2 pretreated glass subtrate by introducing a cyclic on/off modulation of CH4 flow during an initial deposition stage in a vertical-type microwave plasma-enhanced chemical vapor deposition system. Surface morphology and diamond quality of the film were investigated as a function of the cyclic modulation time interval, namely the time for one cycle in the cyclic modulation process. The diamond nucleation density on the pretreated glass substrate was enhanced by increasing the cyclic modulation time interval. Also, enhanced diamond quality was noticeable under the condition of a longer cyclic modulation time interval.

Keywords

Diamond Film, CH4 Flow, computer science

Disciplines

Computer Sciences

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