Enhancement of the Diamond Film Characteristics by Increasing the Cyclic Moducation time Interval of CH4 Flow
New Diamond and Frontier Carbon Technology
M Y U * Scientific Publishing Division
Place of Publication
Diamond films were deposited on a 10.0 × 10.0 mm2 pretreated glass subtrate by introducing a cyclic on/off modulation of CH4 flow during an initial deposition stage in a vertical-type microwave plasma-enhanced chemical vapor deposition system. Surface morphology and diamond quality of the film were investigated as a function of the cyclic modulation time interval, namely the time for one cycle in the cyclic modulation process. The diamond nucleation density on the pretreated glass substrate was enhanced by increasing the cyclic modulation time interval. Also, enhanced diamond quality was noticeable under the condition of a longer cyclic modulation time interval.
Diamond Film, CH4 Flow, computer science
Beomjin Kim (2003).
Enhancement of the Diamond Film Characteristics by Increasing the Cyclic Moducation time Interval of CH4 Flow. New Diamond and Frontier Carbon Technology.13 (6), 333-340. Japan: M Y U * Scientific Publishing Division.